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· The dispersion volume is approximated
· 150nm of Si3N4 deposited by LPCVD on Si
1038/s41467-020-16979-y
· Substrate thickness: 525 μm
· Particle Size:
GFET-S11 for Sensing applications GFET · The dispersion volume isGFET S11 (Die size 10 mm x 10 mm) Processed in ISO 7 Cleanroom The GFET S11 chip from Graphenea provides 31 graphene devices with a van der Pauw (vdP) geometry, distributed in 3 different sizes. 3 vdPs have a 2x2mm2 footprint, 14 vdPs have a 500x500m2 footprint and 14 vdPs have a 125x125m2 footprint. These devices have an optimized geometry for 4 probe measurements in a vdP configuration. These varying graphene device dimensions allow investigation of
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